ISSN   1004-0595

CN  62-1095/O4

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李振东, 詹华, 王亦奇, 汪瑞军, 方宪法. 干摩擦条件下基体粗糙度对Cr-DLC薄膜摩擦磨损性能的影响[J]. 摩擦学学报, 2016, 36(6): 741-748. DOI: 10.16078/j.tribology.2016.06.011
引用本文: 李振东, 詹华, 王亦奇, 汪瑞军, 方宪法. 干摩擦条件下基体粗糙度对Cr-DLC薄膜摩擦磨损性能的影响[J]. 摩擦学学报, 2016, 36(6): 741-748. DOI: 10.16078/j.tribology.2016.06.011
LI Zhendong, ZHAN Hua, WANG Yiqi, WANG Ruijun, FANG Xianfa. Effect of Substrate Roughness on Friction and Wear Properties of Cr-DLC Films under Dry-Sliding Condition[J]. TRIBOLOGY, 2016, 36(6): 741-748. DOI: 10.16078/j.tribology.2016.06.011
Citation: LI Zhendong, ZHAN Hua, WANG Yiqi, WANG Ruijun, FANG Xianfa. Effect of Substrate Roughness on Friction and Wear Properties of Cr-DLC Films under Dry-Sliding Condition[J]. TRIBOLOGY, 2016, 36(6): 741-748. DOI: 10.16078/j.tribology.2016.06.011

干摩擦条件下基体粗糙度对Cr-DLC薄膜摩擦磨损性能的影响

Effect of Substrate Roughness on Friction and Wear Properties of Cr-DLC Films under Dry-Sliding Condition

  • 摘要: 采用磁控溅射/等离子辅助气相沉积方法在不同粗糙度样品表面制备Cr掺杂类金刚石(Cr-DLC)薄膜, 研究了干摩擦条件下, 基体粗糙度对Cr掺杂类金刚石薄膜摩擦磨损性能的影响. 结果表明: 在低表面粗糙度样品上体现了Cr掺杂类金刚石薄膜良好的自润滑特性, 平均摩擦系数在0.1以下, 达到了油润滑条件的摩擦水平, 磨损较小, 磨损表面薄膜结构完整, 未出现明显石墨化转变. 在高表面粗糙度样品上, 样品的平均摩擦系数提高了3~4倍, 磨损剧烈, 基体表面磨出了明显的沟槽, 与其对摩的Si3N4球磨损严重.

     

    Abstract: Cr doped DLC films were prepared on samples with different roughness by magnetron sputtering/plasma assisted vapor deposition. Effect of the substrate roughness on friction and wear properties of Cr doped DLC film under dry-sliding condition was studied. The results show that the Cr doped DLC film on sample with low surface roughness exhibited good self-lubrication properties. The average friction coefficient was below 0.1, which was comparable to that under oil-lubricating condition. Meantime, the mild wear and the film structure on worn surface was well preserved without significant graphitization. However, the average friction coefficient was raised by 3–4 times on samples with high surface roughness. The wear was severe and wear surface included obvious grooves and severe wear of the coupled Si3N4 ball.

     

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