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CN  62-1095/O4

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曹亚楠, 夏延秋, 段宝玉, 穆文雄. 磁控溅射Ag膜磨斑微结构与耐磨机理研究[J]. 摩擦学学报, 2022, 42(2): 225-233. DOI: 10.16078/j.tribology.2020268
引用本文: 曹亚楠, 夏延秋, 段宝玉, 穆文雄. 磁控溅射Ag膜磨斑微结构与耐磨机理研究[J]. 摩擦学学报, 2022, 42(2): 225-233. DOI: 10.16078/j.tribology.2020268
CAO Yanan, XIA Yanqiu, DUAN Baoyu, MU Wenxiong. Wear Scar Microstructure and Anti-wear Mechanism of the Magnetron Sputtered Ag Film[J]. TRIBOLOGY, 2022, 42(2): 225-233. DOI: 10.16078/j.tribology.2020268
Citation: CAO Yanan, XIA Yanqiu, DUAN Baoyu, MU Wenxiong. Wear Scar Microstructure and Anti-wear Mechanism of the Magnetron Sputtered Ag Film[J]. TRIBOLOGY, 2022, 42(2): 225-233. DOI: 10.16078/j.tribology.2020268

磁控溅射Ag膜磨斑微结构与耐磨机理研究

Wear Scar Microstructure and Anti-wear Mechanism of the Magnetron Sputtered Ag Film

  • 摘要: 在铜基底上制备了磁控溅射银膜,采用激光共聚焦显微镜(LSCM)、透射电镜(TEM)、扫描电子显微镜(SEM)及电子背散射衍射(EBSD)等分析技术对载流摩擦试验后的磨斑微结构进行了分析. 结果表明:磨斑表面较平滑,可见犁沟、微坑及塑性流动等形貌,磨斑边缘存在堆积和剥落. 磨斑表面颗粒形态为短棒状和球状,颗粒尺寸为20~150 nm. 磨斑微结构中存在(012)和有利的(111)择优取向,晶粒平均粒度为582 nm,多数晶粒极细小,起到细晶强化作用. 在磨斑微结构中发现大量孪晶,(111)取向孪晶占比达到93.5%,这种高密度孪晶夹杂非孪晶的微结构,有利于材料内部的滑移和提高耐磨性. 在孪晶界发现存在大量111晶面族层错结构,有利于材料晶粒间滑移并提升宏观摩擦性能.

     

    Abstract: Silver film was prepared on copper substrate by magnetron sputtering method, and current-carrying friction experiments were carried out. The maximum contact resistance was obtaided under the load of 5 N and voltage of 1.5 V, and the microstructure of this wear scar was studied further. The laser confocal microscope (LSCM), transmission electron microscope (TEM), scanning electron microscope (SEM) and electron backscatter diffraction (EBSD) analysis techniques were used for observation and analysis of the wear scar microstructure. From the SEM Morphologies, the wear scar surface was smooth and uniform, some furrows, pitting and plastic flow were visible by magnifying observation, and some accumulation and peeling were found in the edges of the wear scar. Some irregular shaped large pitting may formed by plastic deformation, and the formation was also likely to be related to the conductive grease. While, the small pittings with regular shape may formed by friction heat. It was concluded that the flow and accumulation of the Ag film surface were used by the copper ball extrusion, and the grain composition of the Ag film changed during current-carrying friction. Ag particles were found in the wear scar surface, which come in the shape of short rod and spherical ranging in the size 20~150 nm. These little particles would form different crystalline grains, and the average size of the grains was 582 nm calculated by EBSD. Most of the grains were very fine, and fine-grain strengthening of the wear scar microstructure improved the mechanical and tribological properties. By the EBSD analysis, there were (012) and (111) preferred orientations in the microstructure of the wear scar, as the family of crystal faces (111) was the most densely arranged faces of face-centered cubic metal material, such as silver, so that the (111) preferred orientation was beneficial to the tribological properties, but the (012) preferred orientation contributed little to the tribological properties. From the TEM Morphology, some twin silver structure were visible in the microstructure of the wear scar, and lots of 111 crystal plane family stacking fault structure were found between the twin boundaries. The EBSD calculation result shows that the proportion of (111) preferred orientations twin silver reached 93.5%. The high-density twin silver inclusion non-twin crystal microstructure was good to the internal slippage and the wear resistance. The existence of twin dislocation making it easy to slip between grain boundaries, which may be the fundamental reason for theanti-wear properties of Ag film. However, to confirm the proper proportion of twins and non-twin(soft grains), the nanotribological mechanism of the Ag film should be studied further.

     

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