Abstract: Aimed at overcoming the disadvantages in the triangular prism surface area method and the projective covering method, the cubic covering method for estimation of fractal dimension of rough surface is proposed. Moreover, the theoretical problem in the estimation of fractal dimension of rough surfaces is discussed. The comparison analysis shows that the results from the cubic covering method, as a real covering method from the view point of geometry, are closer to the actual value than the results estimated by the triangular prism surface area method and the projective covering method.