中频磁控溅射沉积含铝类金刚石碳膜结构及其摩擦磨损性能研究

ISSN 1004-0595

CN 62-1224/O4

中频磁控溅射沉积含铝类金刚石碳膜结构及其摩擦磨损性能研究[J]. 摩擦学学报, 2008, 28(2): 118-122.

引用本文:

中频磁控溅射沉积含铝类金刚石碳膜结构及其摩擦磨损性能研究[J]. 摩擦学学报, 2008, 28(2): 118-122.

Structure and Tribological Properties of Al-DLC Films Prepared by Medium Frequency Magnetron Sputtering[J]. TRIBOLOGY, 2008, 28(2): 118-122.

Citation:

Structure and Tribological Properties of Al-DLC Films Prepared by Medium Frequency Magnetron Sputtering[J]. TRIBOLOGY, 2008, 28(2): 118-122.

Structure and Tribological Properties of Al-DLC Films Prepared by Medium Frequency Magnetron Sputtering

摘要: 采用中频磁控溅射技术在单晶硅表面制备含铝类金刚石(Al-DLC)薄膜,利用原子力显微镜、X射线光电子能谱仪、红外光谱仪、纳米压痕仪和微摩擦磨损试验机等考察薄膜表面形貌、结构及其摩擦磨损性能.结果表明:所制备的Al-DLC薄膜均匀、致密,表面粗糙度小,应力较低,硬度较高;薄膜与Si3N4陶瓷球对摩时显示出良好抗磨减摩性能;加基底偏压所制备薄膜的摩擦系数明显降低, 耐磨寿命显著提高.

/