Abstract: MoS_x-doped diamond-like carbon (a-C:H:Mo:S) films were prepared using a hybrid radio frequency plasma-enhanced chemical vapor deposition and unbalanced magnetron sputtering deposition technique. Their friction and wear behaviors under different normal loads were investigated on a QG-700 tribometer and 3D surface profilometer. The friction and wear mechanism was briefly discussed based on the characterizations of frictional surfaces. The results reveal that both the friction coefficient and the wear rate first decrease and then increase with increasing normal load, especially at a higher sliding speed, which is considered to be closely related to the friction-induced heating effect.