ISSN   1004-0595

CN  62-1095/O4

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孔良桂, 徐书生, 郝俊英. 射频非平衡磁控溅射WS2薄膜的结构及其摩擦学性能研究[J]. 摩擦学学报, 2015, 35(4): 386-392. DOI: 10.16078/j.tribology.2015.04.005
引用本文: 孔良桂, 徐书生, 郝俊英. 射频非平衡磁控溅射WS2薄膜的结构及其摩擦学性能研究[J]. 摩擦学学报, 2015, 35(4): 386-392. DOI: 10.16078/j.tribology.2015.04.005
KONG Liang-gui, XU Shu-sheng, HAO Jun-ying. Structural and Tribological Properties of WS2 Films Deposited by Radio Frequency Unbalanced Magnetron Sputtering[J]. TRIBOLOGY, 2015, 35(4): 386-392. DOI: 10.16078/j.tribology.2015.04.005
Citation: KONG Liang-gui, XU Shu-sheng, HAO Jun-ying. Structural and Tribological Properties of WS2 Films Deposited by Radio Frequency Unbalanced Magnetron Sputtering[J]. TRIBOLOGY, 2015, 35(4): 386-392. DOI: 10.16078/j.tribology.2015.04.005

射频非平衡磁控溅射WS2薄膜的结构及其摩擦学性能研究

Structural and Tribological Properties of WS2 Films Deposited by Radio Frequency Unbalanced Magnetron Sputtering

  • 摘要: 采用射频非平衡磁控溅射技术制备了具有不同(002)择优取向程度的WS2 薄膜,研究了Ar流量对薄膜成分、微观结构、力学性能和摩擦学性能的影响.研究表明:随Ar流量的增大,WS2薄膜的S/W原子比和(002)衍射峰强度均表现出先降低后升高的变化趋势,而硬度和弹性模量表现出先升高后降低的变化趋势.在大气环境下,WS2薄膜的(002)择优取向程度、S/W原子比以及硬度对薄膜的摩擦学性能均具有显著影响,当S/W原子比较低、(002)择优取向度弱、硬度较高时,薄膜脆性较大,易于发生润滑失效;当S/W原子比、(002)择优取向度和硬度均较高时,薄膜结构致密,且摩擦过程中在对偶表面易于形成有效的转移膜,薄膜表现出较好的减摩、抗黏着特性和优异的抗磨性能.

     

    Abstract: WS2 films with different degree of(002) preferential orientation were deposited on n-(100) Si substrates by radio frequency unbalanced magnetron sputtering. The chemical composition and microstructure of WS2 films were characterized by energy dispersive X-ray spectroscopy and X-ray diffractometer, scanning electron microscopy. The mechanical and tribological perperties were measured by nano-indentation and tribo-meter in ball-on-disk mode. The results show that the tribological performance of WS2 films in terrestrial was influenced by Ar flow rate. With the increment of Ar flow rate, the S/W ratio of the films firstly decreased, and then increased. The trend of (002) diffraction peak was in consistent with the S/W ratio, while hardness and elastic modulus were opposite to the S/W ratio. It is found that the failure took place quickly for WS2 films with the low S/W ratio, high hardness and poor crystallinity of WS2 films. Inversely, when the relatively high S/W ratio and sharp (002) diffraction peak simultaneously appeared, the low friction coefficient and excellent wear resistance were obtained as the effective transfer films presented. However, the wear resistance declined since the hardness of WS2 films was not high enough to bear load.

     

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