Abstract: The process of pure magnetic abrasive finishing(PMAF) on the inner surface of superhard precise Al₂O₃ ceramic tubes is low efficient and causes to uneven texture. In order to improve the process, the technique of vibration-assisted magnetic abrasive finishing has been proposed.The crank slider vibration mechanism(CSVM) and ultrasonic vibration mechanism(UVM) were applied to assist magnetic abrasive finishing, changing the trajectory of the magnetic abrasive brush(MAB).The processing effect and efficiency of these two methods were compared with PMAF and the influence of the frequency and amplitude on the processing effect and efficiency was analyzed.The results show that vibration-assisted magnetic abrasive finishing has made the finishing of the inner surface of superhard precise Al₂O₃ ceramic tubes efficiently and critically come true.After 50 min processing, the finishing effect of the ultrasonic vibration-assisted magnetic abrasive finishing is the best, making the machining efficiency increase by 70% and the surface roughness of R_a fall from an average level of 1.1μm to 0.03μm below.The vibration of high frequency and little amplitude has a better influence on the processing effect and efficiency.