Abstract: The current state and progress of the micro tribological studies on micro electro mechanical systems (MEMS) are summarized. Various new features of the friction and wear behavior of the MEMS are introduced. And the effects of the material properties, environments and working conditions on the operation of MEMS are briefed. The lubrication of MEMS is elucidated with a viewpoint of nano tribology, while the application of surface modification and ultra thin film lubrication for MEMS is discussed. Moreover, a prospect is also provided concerning further work on the micro and nano tribology on MEMS.