载气对气相沉积BN膜的形成及摩擦学性能的影响研究

ISSN 1004-0595

CN 62-1224/O4

载气对气相沉积BN膜的形成及摩擦学性能的影响研究[J]. 摩擦学学报, 1999, 19(2): 117-121.

引用本文:

载气对气相沉积BN膜的形成及摩擦学性能的影响研究[J]. 摩擦学学报, 1999, 19(2): 117-121.

Effects of Carrier Gas on the Formation and Tribological Performance of BN Films Deposited by PCVD[J]. TRIBOLOGY, 1999, 19(2): 117-121.

Citation:

Effects of Carrier Gas on the Formation and Tribological Performance of BN Films Deposited by PCVD[J]. TRIBOLOGY, 1999, 19(2): 117-121.

Effects of Carrier Gas on the Formation and Tribological Performance of BN Films Deposited by PCVD

摘要: 以Ａｒ＋１０％Ｈ２（体积分数）Ｈ２及Ｎ２为载气，采用射频ＰＣＶＤ技术在４０Ｃｒ钢表面制备了ＢＮ膜，对沉积ＢＮ膜进行了ＦＴＩＲ，ＴＥＭ和ＳＥＭ等分析，并对不同载气下膜与基体的结合力，膜层残余应力，硬度及耐磨性进行了比较，结果表明，ＢＮ膜中，ｃ－ＢＮ含量分别为５８．１％，２７．７％和２７．４％，膜厚分别为４．６μｍ，２．０μｍ和３．３μｍ。

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