ISSN   1004-0595

CN  62-1095/O4

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脉冲直流等离子体增强化学气相沉积Ti—Si—N纳米薄膜的摩擦磨损特性[J]. 摩擦学学报, 2003, 23(6): 476-479.
引用本文: 脉冲直流等离子体增强化学气相沉积Ti—Si—N纳米薄膜的摩擦磨损特性[J]. 摩擦学学报, 2003, 23(6): 476-479.
Friction and Wear Characteristics of Nano-Structured Ti-Si-N Films on a High Speed Steel Substrate Prepared by Pulsed-Direct Current Plasma Enhanced Chemical Vapor Deposition[J]. TRIBOLOGY, 2003, 23(6): 476-479.
Citation: Friction and Wear Characteristics of Nano-Structured Ti-Si-N Films on a High Speed Steel Substrate Prepared by Pulsed-Direct Current Plasma Enhanced Chemical Vapor Deposition[J]. TRIBOLOGY, 2003, 23(6): 476-479.

脉冲直流等离子体增强化学气相沉积Ti—Si—N纳米薄膜的摩擦磨损特性

Friction and Wear Characteristics of Nano-Structured Ti-Si-N Films on a High Speed Steel Substrate Prepared by Pulsed-Direct Current Plasma Enhanced Chemical Vapor Deposition

  • 摘要: 采用工业型脉冲等离子体增强化学气相沉积设备,通过调节氯化物混合比例控制薄膜成分,在高速钢基材表面于550℃下沉积由纳米晶TiN和纳米非晶Si3N4组成的Ti—Si—N复合薄膜;采用扫描电子显微镜、透射电子显微镜、X射线衍射仪及X射线光电子能谱仪分析了薄膜的结构、组成和化学状态;采用球-盘高温摩擦磨损试验机考察了薄膜同GCrl5钢对摩时的摩擦磨损性能.结果表明:薄膜的Si含量在0%~35%范围内变化,随着Si含量增大,薄膜沉积速率增大,但薄膜由致密形态向大颗粒疏松态过渡;薄膜的晶粒尺寸为7~50nm;Ti—Si—N薄膜的显微硬度高于TiN的硬度,最高可达60GPa;引入少量Si可以显著改善TiN薄膜的抗磨性能,但薄膜的摩擦系数较高(室温下约0.8、400℃下约0.7);随着Si含量的增加,Ti—Si—N薄膜的耐磨性能有所降低,其原因在于引入导电性较差的Si元素使得薄膜的组织变得疏松.

     

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