ISSN   1004-0595

CN  62-1095/O4

高级检索
Al/AlN多层膜的摩擦磨损性能研究[J]. 摩擦学学报, 2007, 27(3): 204-209.
引用本文: Al/AlN多层膜的摩擦磨损性能研究[J]. 摩擦学学报, 2007, 27(3): 204-209.
Study on Tribological Behavior of Al/AlN Multilayers[J]. TRIBOLOGY, 2007, 27(3): 204-209.
Citation: Study on Tribological Behavior of Al/AlN Multilayers[J]. TRIBOLOGY, 2007, 27(3): 204-209.

Al/AlN多层膜的摩擦磨损性能研究

Study on Tribological Behavior of Al/AlN Multilayers

  • 摘要: 采用柱状靶磁控溅射系统制备Al/AlN纳米多层膜,采用纳米压痕仪测量Al/AlN纳米多层膜的纳米硬度,在UMT-2M型摩擦磨损试验机上评价其摩擦磨损性能.结果表明:当AlN层较厚时,薄膜在很短时间内被磨穿;调节Al/AlN层厚比为2.9/1.1时,薄膜的摩擦磨损性能明显提高;当保持Al/AlN层厚比为2.9/1.1、变化多层膜的调制周期时,薄膜的摩擦系数较低,但硬度较低的薄膜由于承载能力不够,不能够保持优良的摩擦磨损性能.

     

    Abstract: Al/AIN muhilayers were prepared by cylindrical DC magnetron sputtering method. The hardness of the Al/AIN multilayer films was determined using a nano-indentation tester. The wear properties of the films were measured by a UMT-2MT tester in reciprocating mode. The tribological properties of the Al/AIN multilayers showed obvious enhancement in the Al/AIN layer thickness ratio of 2.9/1.1 compared to the thick AIN layer in modulation period. With the same Al/AIN layer thickness ratio but varying modulation period, the film exhibited low friction coefficient, but it also exhibited poor tribological performance at high load due to its low hardness.

     

/

返回文章
返回