Effect of Ion Implantation
on the Interface Chemical States a nd Tribological Behavior of Amorphous Carbon Film on
SiO2 Substrate[J]. TRIBOLOGY, 2001, 21(1): 6-9.
Citation:
Effect of Ion Implantation
on the Interface Chemical States a nd Tribological Behavior of Amorphous Carbon Film on
SiO2 Substrate[J]. TRIBOLOGY, 2001, 21(1): 6-9.
离子注入对SiO2表面非晶碳薄膜的化学状态及摩擦学性能的影响
Effect of Ion Implantation
on the Interface Chemical States a nd Tribological Behavior of Amorphous Carbon Film on
SiO2 Substrate