Abstract: Polar perfluoropolyether lubricant film has been fabricated on single crystal silicon by dip coating technique. The contact angles of distilled water droplet on the single crystal surface and the lubricant film surface were measured with a contact angle meter and the chemical states of C of the film determined with an X ray photoelectron spectrometer. The friction behavior of the film in sliding against SAE52100 steel was investigated with a DF PM dynamic static friction coefficient procession measurement apparatus. As the results, perfluoropolyether lubricant film is successfully prepared on single crystal surface by dip coating process and the resultant lubricant film shows a considerably decreased friction coefficient than the single crystal silicon substrate, in sliding against the steel.