ISSN   1004-0595

CN  62-1095/O4

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相结构对氮化钛硼薄膜摩擦磨损性能的影响[J]. 摩擦学学报, 2008, 28(1): 28-32.
引用本文: 相结构对氮化钛硼薄膜摩擦磨损性能的影响[J]. 摩擦学学报, 2008, 28(1): 28-32.
Effect of Phase Configuration on Wear Behavior of TiBxNy Thin Films[J]. TRIBOLOGY, 2008, 28(1): 28-32.
Citation: Effect of Phase Configuration on Wear Behavior of TiBxNy Thin Films[J]. TRIBOLOGY, 2008, 28(1): 28-32.

相结构对氮化钛硼薄膜摩擦磨损性能的影响

Effect of Phase Configuration on Wear Behavior of TiBxNy Thin Films

  • 摘要: 采用直流非平衡磁控溅射系统在单晶硅片表面制备TiBxNy薄膜,采用X射线衍射仪和X射线光电子能谱议测定TiBxNy薄膜的相结构和成分,采用销-盘式摩擦磨损试验机研究TiBxNy薄膜的滑动干摩擦磨损性能,并采用光学显微镜、扫描电子显微镜和X射线光电子能谱仪表征薄膜的磨痕表面结构及其化学特征.研究表明:TiBxNy薄膜的相结构与N含量有关,在TiB0.65薄膜中加入N能够促使纳米晶TiN的形成;薄膜的摩擦系数和磨损率与其相结构有关,随着薄膜中TiN的体积分数增加,摩擦系数增大,磨损率降低;当薄膜中N含量约为37at.%时,TiN的体积分数和摩擦系数最高,磨损率最低;增加N含量促使h-BN相形成,且h-BN相的体积分数随N含量的增加而增大,h-BN相的形成降低了摩擦系数,增加了磨损率;在摩擦过程中磨屑发生氧化而生成钛的氧化物TiO、Ti2O3、TiO2以及少量硼(B)的氧化物.

     

    Abstract: TiBxNy coating were deposited on polished system. The phase configuration and chemical ingredi Si wafers in a reactive unbalanced dc magnetron sputtering ent of TiBxNy coating were analyzed by X-ray diffraction and X-ray photoelectron spectroscopy. Dry sliding wear behavior of TiBxNy coating was studied using pin-on-disk tribometer, while wear debris and worn surface configuration and chemical character were investigated using optical line TiN. The frictional coefficient and wear rate were related to the phase configuration. Increasement of TiN increased frictional coefficient and decreased wear rate. When N content was about 37at. %, TiN fraction reached maximum, the friction coefficient reached maximum and the wear rate reached minimum. Increasement of N Fraction was helpful for the formation of h-BN, and the BN phase increased with the increasement of N content. The formation of BN phase decreased frictional coefficient and increased wear rate. Oxidation of wear debris took place during sliding, as a result it formed wear debris comprised of various types of Ti oxides including TiO, TiO2, Ti2O3, and B oxide which increased wear resistance.

     

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