Abstract: Ceramic based ultra thin films are promising candidates as protective coatings for wear resistance, anticorrosion, and heat resistance against oxidation, which possess superior physical, chemical, and mechanical properties. The processes to prepare sol gel ceramic based ultra thin films are introduced. The recent progress of the tribological investigation on the resulting ceramic based ultra thin films is reviewed. The characterization of the ceramic based ultra thin films is briefed, and the topics to be furthered are suggested as well.