ISSN   1004-0595

CN  62-1095/O4

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相对湿度对类金刚石薄膜摩擦磨损性能的影响[J]. 摩擦学学报, 2005, 25(5): 426-430.
引用本文: 相对湿度对类金刚石薄膜摩擦磨损性能的影响[J]. 摩擦学学报, 2005, 25(5): 426-430.
Tribological Property of Diamond-Like Carbon Film at Different Humidity in Air[J]. TRIBOLOGY, 2005, 25(5): 426-430.
Citation: Tribological Property of Diamond-Like Carbon Film at Different Humidity in Air[J]. TRIBOLOGY, 2005, 25(5): 426-430.

相对湿度对类金刚石薄膜摩擦磨损性能的影响

Tribological Property of Diamond-Like Carbon Film at Different Humidity in Air

  • 摘要: 利用等离子体增强化学气相沉积技术在单晶硅表面制备了含氢类金刚石薄膜,在球-盘摩擦磨损试验机上考察了相对湿度对薄膜摩擦磨损性能的影响,利用扫描电子显微镜和X射线光电子能谱仪观察和分析其磨损表面形貌和化学状态的变化情况.结果表明,随着相对湿度增加,DLC薄膜的摩擦系数和磨损率增加.这主要是由于薄膜表面氧化作用所致.

     

    Abstract: Diamond-like carbon films were successfully deposited on Si substrate by plasma enhanced chemical vapor deposition(PECVD).Friction and wear behaviors of DLC film sliding against a Si3N4 ball at different humidity(5%,20%,40%,60%,80%,and 100%)were measured using a roating-type ball-on-disk tribometer in air. Friction surfaces of the films and Si_3N_4 balls wear were investigated by scanning electron microscope(SEM), and by X-ray photoelectron spectroscopy (XPS). It was found that surface of DLC coating was oxidized by a tribochemical reaction which caused an increase in friction coefficient and wear rate when relative humidity of test environment increased.

     

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