Abstract: TIN / Ti composite film was prepared on Ti811 surface by vacuum cathode arc deposition ( VCAD ) and magnetron sputtering ( MS ) technique , respectively TIN / Ti multilayer was deposited by MS The composition distribution , bonding strength , micro -hardness and ductility of the films were measured The effects of the films with different structures on the tribological property and fretting fatigue ( FF ) resistance of the titanium alloy substrate at elevated temperature were comparatively studied The results indicated that both the TIN / Ti composite film and the TIN / Ti multilayer effectively increased the hardness and wear resistance of the titanium alloy The VCAD TIN / Ti composite film could significantly improve the FF resistance of the titanium alloy and was better than the MS TIN / Ti composite film because of the good toughness and high bonding strength of the VCAD TIN / Ti composite film with excellent lubrication of Ti particles in the film The MS TIN / Ti multilayer were more effective in improving FF resistance than MS TIN / Ti composite film because the former had good toughness and antifriction properties