Abstract: Epoxy surface groups were fabricated from epoxysilanes to serve as a template for chemical anchoring of poly(maleic anhydride-alt-1-octadecene)(PMAO) polymer layers. The structures of these films were characterized by Fourier transform infrared (FTIR) spectroscopy and atomic force microscopy (AFM), and the micro- and macro-tribological studies were carried out to evaluate the adhesion, friction, and wear of these films. The results show that PMAO form steady polymer layer with substrate, and the epoxysilane enhanced the stability and integrity of polymer/inorganic interface. The polymer layer possessed excellent friction-reduction and anti-wear properties in micro- and macro-scale. They could be potential protective layers of Si-based materials for friction-reducing and wear-resistant.