原子力显微镜在纳米摩擦学中应用的进展

Advances in Nanotribological Applications of Atomic Force Microscope

摘要: 近年来，原子力显微镜在纳米摩擦学研究中获得了越来越广泛的应用，已经成为进行纳米摩擦学研究的重要工具之一，有力地促进了纳米摩擦学的发展．因此，对应用原子力显微镜研究纳米摩擦、纳米磨损、纳米润滑、纳米摩擦化学反应和微型机电系统的纳米表面工程等方面所取得的主要进展作了系统的综合归纳与阐述，并且提出了原子力显微镜在纳米摩擦学应用中亟待解决的几个主要问题．

Abstract: Recently, the atomic force microscope(AFM), one of the most important instruments has been found very wide application in the nanotribological researches. It promoted the development of nanotribology greatly. The main advances in the application of AFM to the researches of nanofriction, nanowear, nanolubrication, nanotribochmical reaction ,and nano surface engineering for micro electromechanical systems were reviewed. In addition, some problems urgently to be solved in the nanotribological application of AFM were proposed.