Abstract: Based on the examination of calculation process of surface deformation and discrete convolution, an FFT-based method for calculation of surface deformation was derived and described. The method requires a pretreatment for the discrete data of influence coefficients and pressure distribution so as to get rid of the periodic errors. Numerical examples are given to validate the method and to compare the results with those from other fast approaches. The results show that the FFT-based method is very accurate and efficient. It has a great potential in application to the numerical analysis of mechanical parameters, such as surface deformations and temperature rises.