Abstract: Rare earth solution ( RES ) surface modification and appropriate acid -treatment were used to functionalize carbon nanotubes ( CNTO_s) Through a self -assembling process , carbon nanotube ( CNT ) composite thin films were prepared on hydroxylated glass substrates from a specially formulated solution Atomic force microscope ( AFM ) , scanning electron microscope ( SEM ) and X–ray photoelectron spectrometry(XPS ) were used to characterize the thin films The tribological properties of the films sliding against SAE52100 steel ball were evaluated on a UMT -ZMT reciprocating friction and wear tester The results showed that due to the chemisorption ability of -SO3H group , CNT composite films were successfully deposited on oxidized MPTS -SAM The tribological tests showed that the friction coefficient was markedly reduced from 0 85 ( bare glass substrate ) to 0.10 after the formation of CNT -SAM on its surface , which indicated its promising applications in microelectromechanical system ( MEMS )