Abstract: F-Si-codoped diamond-like carbon film was successfully fabricated by plasma enhanced chemical vapor deposition system. The structure and chemical composition were examined by Raman and X-ray photoelectron spectrometer. The adhesion between film and substrate was examined by scratch tester. The tribological results show that low friction about 0.05~0.1 was observed under low applied load (1~6 N). When the load was higher than 6 N, high friction in the range from 0.2 to 0.27 was observed. The optical images of wear scar showed that transfer film was detected on the wear scar corresponding to low friction; under high applied load, the transfer film was observed in run-in process resulting in low friction, however, the transfer film was disrupted after run-in process corresponding to high friction.