Abstract: Diamond-like carbon/Silicon films were deposited on 304 stainless steels by plasma enhanced chemical vapor deposition. The influence of parameter for transition layer on the transition layer structure was investigated by Auger electron spectroscopy techniques. Residual stress, adhesive strength and tribological property were evaluated using interferometry, scratch, and reciprocating sliding friction testing. Results show that a transition layer consist of (Fe-Si-O)/Si/(Si-C) was developed between substrate and DLC film. The thickness of transition layers were decreased along with the increase of pressure, voltage and the ratio of Ar/SiH₄. The transition layer improved the adhesion of DLC film and released the stress due to a mismatch between the film and substrate. The coefficient of friction and wear rate of DLC films against GCr 15 steel ball under atmosphere was as low as 0.02 and 8.2×10^-14 m³/(N·m), respectively.