ISSN   1004-0595

CN  62-1095/O4

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张玉鹏, 王振玉, 汪爱英, 柯培玲. 直流复合高功率脉冲磁控溅射VAlN-Ag涂层的宽温域摩擦特性研究[J]. 摩擦学学报, 2024, 44(3): 1−11. doi: 10.16078/j.tribology.2022265
引用本文: 张玉鹏, 王振玉, 汪爱英, 柯培玲. 直流复合高功率脉冲磁控溅射VAlN-Ag涂层的宽温域摩擦特性研究[J]. 摩擦学学报, 2024, 44(3): 1−11. doi: 10.16078/j.tribology.2022265
ZHANG Yupeng, WANG Zhenyu, WANG Aiying, KE Peiling. Tribological Behavior of VAlN-Ag Coating Prepared by Direct Current Combined with High Power Pulsed Magnetron Sputtering Over a Wide Temperature Range[J]. Tribology, 2024, 44 (3): 1−11. doi: 10.16078/j.tribology.2022265
Citation: ZHANG Yupeng, WANG Zhenyu, WANG Aiying, KE Peiling. Tribological Behavior of VAlN-Ag Coating Prepared by Direct Current Combined with High Power Pulsed Magnetron Sputtering Over a Wide Temperature Range[J]. Tribology, 2024, 44 (3): 1−11. doi: 10.16078/j.tribology.2022265

直流复合高功率脉冲磁控溅射VAlN-Ag涂层的宽温域摩擦特性研究

Tribological Behavior of VAlN-Ag Coating Prepared by Direct Current Combined with High Power Pulsed Magnetron Sputtering Over a Wide Temperature Range

  • 摘要: 通过直流磁控溅射(DCMS)复合高功率脉冲磁控溅射(HiPIMS)技术制备了VAlN/VAlN-Ag复合涂层,调控HiPIMS靶功率控制Ag质量分数变化范围(11.4%、19.8%、24.5%),探究了涂层在25、300和650 ℃温度下的摩擦学性能. 在室温摩擦条件下,3种涂层的摩擦系数均较高,当温度升高至300和650 ℃时,摩擦系数随Ag含量增加而降低,高Ag含量(质量分数24.5%)涂层摩擦系数最低,分别为0.45和0.23. 磨损率随温度升高而增加,宽温域环境中,低Ag含量的S1 (Ag质量分数为11.4%)涂层具有最优的力学性能和最低的磨损率,使复合涂层在宽温域内表现出良好的摩擦学性能. 复合涂层的物相结构、元素价态和化学键在中低温摩擦环境中无明显变化;经650 ℃摩擦试验后,涂层表面发生摩擦化学反应,V和Ag元素的价态升高,生成层状结构的AgVO3和Ag3VO4高温润滑相,有效降低涂层的摩擦系数. 高温摩擦过程中伴随着元素扩散,涂层内部微结构演变成致密的Al2O3层包裹钒酸银润滑相的表层结构,V2O5和NiO这2种物相为主的中间层,以及Ti主导的过渡层结构. 高温磨损机制表现为粘着磨损和氧化磨损.

     

    Abstract: With the development of aviation engine technology, the high flow ratio and thrust weight ratio is gradually improved, especially components such as brush seal and foil air bearing will serve in harsh environment of high-speed and wide temperature from 25 ℃ to 650 ℃. The insufficient lubrication will cause friction and wear of surface, decreasing sealing performance, shortening service life and affecting safe and reliable operation of engine. Therefore, developing low friction coating with good lubrication, long service life and wear resistance over wide temperature range to prevent wear and failure of component, and improve the service life. The VAlN hard coating with high hardness, wear resistance, and good thermal stability was selected to prepare chameleon composite coating combining with soft metal Ag. In view of the high power pulsed magnetron sputtering (HiPIMS) had the excellent discharge characteristics of low discharge frequency, high plasma density and high ionization rate, which was conducive to the preparation of low defect, dense and smooth surface of coatings. Meanwhile, the deposition rate of sputtering soft metal was lower than that of direct current magnetron sputtering (DCMS) under the same power. Therefore, during the preparation process, the DCMS technology combined with HiPIMS technology was utilized to prepare the chameleon composite coating by the home-made multi-target reactive magnetron sputtering equipment. Among them, DCMS technology was utilized to sputter VAl alloy targets, and regulated target power through the HiPIMS to control Ag contents, then fabricated the VAlN/VAlN-Ag composite coatings with different Ag contents (11.4%, 19.8%, 24.5%). The tribological behavior at 25 ℃, 300 ℃ and 650 °C were investigated in this article. The friction coefficient of three coatings were close to each other and relatively high at 25 ℃, but with the increase of temperature to 300 °C and 650 °C, the friction coefficient reduced with increasing of Ag content, as well as the coating with 24.5% Ag obtained the lowest friction coefficient of 0.45 and 0.23. The wear rate increased with the rise of temperature from 25 ℃ to 650 ℃, the S1 coating with the best mechanical properties possessed the lowest wear rate, the composite coatings exhibited great tribological behavior over wide temperature range. It was found that the phase structure, element valence and chemical bond of coating unchanged after friction at 25 ℃ and 300 ℃, and the behavior of elements diffusion was not obviously. The tribochemical reaction was occurred during friction test at 650 ℃, thus the valence states of V and Ag elements increased and the AgVO3 and Ag3VO4 with layered structure were mainly formed. The formed high-temperature lubricating phase played the key factor to effectively reduce friction coefficient, improve the friction and wear resistance of coatings, as well as tolerable higher temperature. The diffusion of V and Ag elements to the coating surface occurred during high temperature friction process, which adjusted the elemental composition and structure of contact interface. As a results, the internal microstructure changed obviously, which were the surface layer mainly composed of bimetallic lubricating phase and dense Al2O3 protective layer, the intermediate layer mainly composed of V2O5 and NiO phases, and the bottom layer dominated by Ti transition layer. The wear mechanism was mainly adhesive wear and oxidative wear during the friction at 650 ℃. This article provided a theoretical basis and experimental basis for the design and preparation of low friction coatings over wide temperature range.

     

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